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Shouldering in B diffusion profiles in Si: Role of di-boron diffusion
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10.1063/1.1619219
/content/aip/journal/apl/83/17/10.1063/1.1619219
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/17/10.1063/1.1619219
/content/aip/journal/apl/83/17/10.1063/1.1619219
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/content/aip/journal/apl/83/17/10.1063/1.1619219
2003-10-20
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Shouldering in B diffusion profiles in Si: Role of di-boron diffusion
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/17/10.1063/1.1619219
10.1063/1.1619219
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