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Shell-type micromechanical actuator and resonator
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10.1063/1.1622792
/content/aip/journal/apl/83/18/10.1063/1.1622792
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/18/10.1063/1.1622792
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/content/aip/journal/apl/83/18/10.1063/1.1622792
2003-10-28
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Shell-type micromechanical actuator and resonator
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/18/10.1063/1.1622792
10.1063/1.1622792
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