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Effect of the interface on self-diffusion of Si in semiconductor-grade
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10.1063/1.1625775
/content/aip/journal/apl/83/19/10.1063/1.1625775
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/19/10.1063/1.1625775
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/content/aip/journal/apl/83/19/10.1063/1.1625775
2003-11-03
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of the Si/SiO2 interface on self-diffusion of Si in semiconductor-grade SiO2
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/19/10.1063/1.1625775
10.1063/1.1625775
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