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Density functional theory study of and decomposition on hydroxylated Initial stage of high-k atomic layer deposition
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10.1063/1.1587261
/content/aip/journal/apl/83/3/10.1063/1.1587261
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/3/10.1063/1.1587261
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/content/aip/journal/apl/83/3/10.1063/1.1587261
2003-07-16
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Density functional theory study of HfCl4,ZrCl4, and Al(CH3)3 decomposition on hydroxylated SiO2: Initial stage of high-k atomic layer deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/3/10.1063/1.1587261
10.1063/1.1587261
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