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Hydrogenation of Si from films: Characterization of H introduced into the Si
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18.If molecules were introduced into the Si, they would not be easily seen by IR spectroscopy because of the weakness of their vibrational absorption. We have annealed a few samples at 200 °C where the molecule would be dissociated and give rise to impurity-H complexes. No new PtH complexes were found in these test experiments, leading us to conclude that any concentration of molecules is smaller that the concentration of PtH complexes we have detected.
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