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Analysis of ultrathin interface layers in chemical vapor deposition of on Si by in situ scanning transmission electron microscopy
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10.1063/1.1597415
/content/aip/journal/apl/83/6/10.1063/1.1597415
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/6/10.1063/1.1597415
/content/aip/journal/apl/83/6/10.1063/1.1597415
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/content/aip/journal/apl/83/6/10.1063/1.1597415
2003-08-05
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analysis of ultrathin SiO2 interface layers in chemical vapor deposition of Al2O3 on Si by in situ scanning transmission electron microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/6/10.1063/1.1597415
10.1063/1.1597415
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