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Radiation-induced nitrogen segregation during electron energy loss spectroscopy of silicon oxide–nitride-oxide stacks
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10.1063/1.1604182
/content/aip/journal/apl/83/8/10.1063/1.1604182
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/8/10.1063/1.1604182
/content/aip/journal/apl/83/8/10.1063/1.1604182
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/content/aip/journal/apl/83/8/10.1063/1.1604182
2003-08-19
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Radiation-induced nitrogen segregation during electron energy loss spectroscopy of silicon oxide–nitride-oxide stacks
http://aip.metastore.ingenta.com/content/aip/journal/apl/83/8/10.1063/1.1604182
10.1063/1.1604182
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