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Metal-coated Si springs: Nanoelectromechanical actuators
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10.1063/1.1738935
/content/aip/journal/apl/84/18/10.1063/1.1738935
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/18/10.1063/1.1738935
/content/aip/journal/apl/84/18/10.1063/1.1738935
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/content/aip/journal/apl/84/18/10.1063/1.1738935
2004-04-20
2014-12-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Metal-coated Si springs: Nanoelectromechanical actuators
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/18/10.1063/1.1738935
10.1063/1.1738935
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