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Study of the temperature-dependent interaction of 4H–SiC and 6H–SiC surfaces with atomic hydrogen
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10.1063/1.1748845
/content/aip/journal/apl/84/20/10.1063/1.1748845
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/20/10.1063/1.1748845
/content/aip/journal/apl/84/20/10.1063/1.1748845
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/content/aip/journal/apl/84/20/10.1063/1.1748845
2004-05-05
2014-11-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of the temperature-dependent interaction of 4H–SiC and 6H–SiC surfaces with atomic hydrogen
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/20/10.1063/1.1748845
10.1063/1.1748845
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