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Initial growth mechanism of atomic layer deposited TiN
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10.1063/1.1760217
/content/aip/journal/apl/84/22/10.1063/1.1760217
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/22/10.1063/1.1760217
/content/aip/journal/apl/84/22/10.1063/1.1760217
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/content/aip/journal/apl/84/22/10.1063/1.1760217
2004-05-14
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Initial growth mechanism of atomic layer deposited TiN
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/22/10.1063/1.1760217
10.1063/1.1760217
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