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Atom motion of Cu and Co in Cu damascene lines with a CoWP cap
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10.1063/1.1762991
/content/aip/journal/apl/84/24/10.1063/1.1762991
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/24/10.1063/1.1762991
/content/aip/journal/apl/84/24/10.1063/1.1762991
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/content/aip/journal/apl/84/24/10.1063/1.1762991
2004-05-28
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atom motion of Cu and Co in Cu damascene lines with a CoWP cap
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/24/10.1063/1.1762991
10.1063/1.1762991
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