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Stress field in sputtered thin films: Ion irradiation as a tool to induce relaxation and investigate the origin of growth stress
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10.1063/1.1763637
/content/aip/journal/apl/84/24/10.1063/1.1763637
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/24/10.1063/1.1763637
/content/aip/journal/apl/84/24/10.1063/1.1763637
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/content/aip/journal/apl/84/24/10.1063/1.1763637
2004-05-28
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stress field in sputtered thin films: Ion irradiation as a tool to induce relaxation and investigate the origin of growth stress
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/24/10.1063/1.1763637
10.1063/1.1763637
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