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Carbon nanotube electron source based ionization vacuum gauge
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10.1063/1.1767956
/content/aip/journal/apl/84/26/10.1063/1.1767956
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/26/10.1063/1.1767956
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

image of multiwall carbon nanotube sample grown on substrate.

Image of FIG. 2.
FIG. 2.

Illustration of source ionization gauge.

Image of FIG. 3.
FIG. 3.

(a) Emission performance of the electron source. sample: , -gate spacing: , -anode spacing: . emission reproducibility was achieved between operation cycles, (b) emission stability under different vacuum conditions for electron source, emission field: .

Image of FIG. 4.
FIG. 4.

System pressure and partial pressures variations with operating the source. When reaching highest test current of total and partial pressures are: (total), , , , , and . The error bars show the uncertainties of partial pressure measurements by the .

Image of FIG. 5.
FIG. 5.

Measurement linearity between ion collection current and system pressure for ionization gauge tested in nitrogen. Gauge electrical parameters: potential of anode and reflector: ; potential of source gate: ; potential of source cathode, focus plate, and ion collector: 0; anode current: . The measurement errors are showed with error bars.

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/content/aip/journal/apl/84/26/10.1063/1.1767956
2004-06-17
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Carbon nanotube electron source based ionization vacuum gauge
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/26/10.1063/1.1767956
10.1063/1.1767956
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