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Improvement of crystalline silicon surface passivation by hydrogen plasma treatment
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10.1063/1.1647702
/content/aip/journal/apl/84/9/10.1063/1.1647702
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/9/10.1063/1.1647702
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/content/aip/journal/apl/84/9/10.1063/1.1647702
2004-02-25
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improvement of crystalline silicon surface passivation by hydrogen plasma treatment
http://aip.metastore.ingenta.com/content/aip/journal/apl/84/9/10.1063/1.1647702
10.1063/1.1647702
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