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Reduction of the electrostatic coupling in a large-area internal inductively coupled plasma source using a multicusp magnetic field
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10.1063/1.1784877
/content/aip/journal/apl/85/10/10.1063/1.1784877
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/10/10.1063/1.1784877
/content/aip/journal/apl/85/10/10.1063/1.1784877
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/content/aip/journal/apl/85/10/10.1063/1.1784877
2004-09-13
2014-07-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reduction of the electrostatic coupling in a large-area internal inductively coupled plasma source using a multicusp magnetic field
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/10/10.1063/1.1784877
10.1063/1.1784877
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