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Spectroscopic ellipsometry characterization of films using the Cody–Lorentz parameterized model
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10.1063/1.1784889
/content/aip/journal/apl/85/10/10.1063/1.1784889
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/10/10.1063/1.1784889

Figures

Image of FIG. 1.
FIG. 1.

Cross-section HRTEM image of a point along the layer. The thickness of the layer is . The thickness of the interfacial layer is .

Image of FIG. 2.
FIG. 2.

Comparison of the imaginary part of the dielectric function for obtained by three different models: Cody–Lorentz model, Tauc–Lorentz model, and the Cody–Lorentz model without an interfacial layer. The Cody–Lorentz model reports a significant increase in absorption over the Tauc–Lorentz model.

Image of FIG. 3.
FIG. 3.

Imaginary part of the dielectric function obtained with the Cody–Lorentz model. For films with silicate % range from 10% to 80%.

Tables

Generic image for table
Table I.

Thickness of the film stack modeled by the Cody–Lorentz and Tauc–Lorentz model and compared with TEM results. All thickness values reported in Angstroms.

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/content/aip/journal/apl/85/10/10.1063/1.1784889
2004-09-13
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spectroscopic ellipsometry characterization of HfxSiyOz films using the Cody–Lorentz parameterized model
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/10/10.1063/1.1784889
10.1063/1.1784889
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