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Relation between the radical and plasma density measured using LIF and cutoff probe in a inductively coupled plasma
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10.1063/1.1788880
/content/aip/journal/apl/85/11/10.1063/1.1788880
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/11/10.1063/1.1788880
/content/aip/journal/apl/85/11/10.1063/1.1788880
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/content/aip/journal/apl/85/11/10.1063/1.1788880
2004-09-17
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Relation between the CF2 radical and plasma density measured using LIF and cutoff probe in a CF4 inductively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/11/10.1063/1.1788880
10.1063/1.1788880
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