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A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution
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10.1063/1.1796535
/content/aip/journal/apl/85/13/10.1063/1.1796535
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/13/10.1063/1.1796535
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The optical photograph of the miniaturized biconvex QCM with ideal large-radius hemispherical thickness distribution.

Image of FIG. 2.
FIG. 2.

A fabrication process of the miniaturized biconvex QCM with large-radius hemispherical thickness distribution.

Image of FIG. 3.
FIG. 3.

The profiles of the patterned and reflowed photoresist, and the etched quartz crystal.

Image of FIG. 4.
FIG. 4.

The conductance spectra of the (a) planar QCM, (b) beveled biconvex QCM by the photoresist thermal melting method, and (c) the spherical biconvex QCM by the photoresist reflow with solvent vapor method.

Image of FIG. 5.
FIG. 5.

The function of frequency shift against the square root of viscosity-density production for (a) the planar QCM, (b) the beveled biconvex QCM, and (c) the spherical biconvex QCM.

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/content/aip/journal/apl/85/13/10.1063/1.1796535
2004-09-28
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/13/10.1063/1.1796535
10.1063/1.1796535
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