1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Generation of atomic hydrogen during radio-frequency nitrogenplasma-assisted gas-source molecular-beam epitaxy of III-V dilute nitrides
Rent:
Rent this article for
USD
10.1063/1.1796537
/content/aip/journal/apl/85/13/10.1063/1.1796537
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/13/10.1063/1.1796537
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the experimental setup. Hydrogen is injected independently through an organometallic injector and the spectrum is recorded behind the plasma cavity.

Image of FIG. 2.
FIG. 2.

Emission spectra of the RF plasma source in high brightness mode, (a) without and (b) with hydrogen in the GSMBE chamber; (c) emission spectra of the RF plasma source in low brightness mode with hydrogen in the GSMBE chamber.

Image of FIG. 3.
FIG. 3.

Dependence of the emission line intensity with the hydrogen partial pressure of the GSMBE chamber. The measurements are obtained by varying RF power and for a constant nitrogen partial pressure of ( flow at ).

Image of FIG. 4.
FIG. 4.

Ratio of intensities with the flow of the RF plasma source, for a constant hydrogen partial pressure of in the GSMBE chamber. The dashed line is for eye guidance.

Loading

Article metrics loading...

/content/aip/journal/apl/85/13/10.1063/1.1796537
2004-09-28
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Generation of atomic hydrogen during radio-frequency nitrogenplasma-assisted gas-source molecular-beam epitaxy of III-V dilute nitrides
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/13/10.1063/1.1796537
10.1063/1.1796537
SEARCH_EXPAND_ITEM