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In situ RHEED pattern showing the surface texture of films deposited by IBAD on substrates (, ): (a) amorphous pattern of the substrate; (b)–(d) IBAD- film with a thickness of 3, 6, and , respectively; (e) and (f) pattern after the deposition of homoepitaxial (with a thickness of about at ) on a thick IBAD- layer, view along the and along the direction, respectively.
(a) X-ray diffraction pattern of a -thick homoepitaxial film grown on a -thick IBAD- showing a single (200) orientation (the diffraction spots of the substrate are marked with as asterisk, radiation was used for the measurement); (b) (220) pole figure of for the same sample showing a cube texture.
AFM image showing the surface topography of a film consisting of a -thick IBAD- layer and an additional homoepitaxial layer.
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