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Microlens reflector for out-of-plane optical coupling of a waveguide to a buried silicon photodiode
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10.1063/1.1803617
/content/aip/journal/apl/85/14/10.1063/1.1803617
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/14/10.1063/1.1803617
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic cross section of a waveguide∕reflecting microlens∕buried photodetector structure; (b) top view of a WG∕ML∕PD structure on the left and a WG∕PD structure on the right; (c) an enlarged view of the WG∕ML∕PD structure in (b). The nonsmooth microlens contour in (b) and (c) is due to the photolithography mask and does not seem to affect negatively the coupling.

Image of FIG. 2.
FIG. 2.

Measured coupling efficiencies in structures with and without microlenses.

Image of FIG. 3.
FIG. 3.

Simulation of the microlens reflector coupling effect: (a) distribution of the power exiting the waveguide (and entering the microlens); (b) ray traces inside the microlens; (c) distribution of power coupled into the buried photodetector.

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/content/aip/journal/apl/85/14/10.1063/1.1803617
2004-10-14
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microlens reflector for out-of-plane optical coupling of a waveguide to a buried silicon photodiode
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/14/10.1063/1.1803617
10.1063/1.1803617
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