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Simultaneous short-range smoothening and global roughening during growth of hydrogenated amorphous silicon films
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10.1063/1.1777414
/content/aip/journal/apl/85/16/10.1063/1.1777414
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/16/10.1063/1.1777414
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Roughness as a function of film thickness as measured by fitting the kinetic SE data (curve) or by analysis of AFM images (points). The values for the AFM-measured rms roughness were averaged from five nonoverlapping images from the same sample.

Image of FIG. 2.
FIG. 2.

2D isotropic power spectrum density as a function of film thickness. Each curve is the average of the curves from five different AFM images. The slopes of the first and last curve are both close to as expected when surface diffusion is the smoothening mechanism. The inset is the roughness determined by integrating the curves of five images with different upper cutoffs in : circles , triangles , squares .

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/content/aip/journal/apl/85/16/10.1063/1.1777414
2004-10-22
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Simultaneous short-range smoothening and global roughening during growth of hydrogenated amorphous silicon films
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/16/10.1063/1.1777414
10.1063/1.1777414
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