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Anneal temperature dependence of the PL spectrum from SRSN film after isochronal anneals of . The inset shows the high-resolution TEM image of a nanocrystal Si formed after an anneal at , showing the 0.31 nm spaced fringes corresponding to (111) planes of crystalline Si.
PL spectra of SRSN films with showing the effect of hydrogenation. The open symbols indicate as-annealed films, and the closed symbols indicate the hydrogenated films.
Comparison of PL spectra of SRSN and SRSO films. The open symbols indicate SRSN films, and the closed symbols indicate the SRSO films. The inset shows the dependence of the normalized PL intensity and the PL peak position upon the excess Si content.
PL spectrum of a SRSN film composed of multiple, thin layers with excess Si. The inset shows the schematic structure of this film.
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