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Hydrogen and deuterium incorporation and transport in hafnium-based dielectric films on silicon
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10.1063/1.1801682
/content/aip/journal/apl/85/16/10.1063/1.1801682
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/16/10.1063/1.1801682
/content/aip/journal/apl/85/16/10.1063/1.1801682
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/content/aip/journal/apl/85/16/10.1063/1.1801682
2004-10-22
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen and deuterium incorporation and transport in hafnium-based dielectric films on silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/16/10.1063/1.1801682
10.1063/1.1801682
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