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Oxygen transport and incorporation mechanisms in the dry thermal oxidation of 6H-SiC
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10.1063/1.1807033
/content/aip/journal/apl/85/16/10.1063/1.1807033
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/16/10.1063/1.1807033
/content/aip/journal/apl/85/16/10.1063/1.1807033
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/content/aip/journal/apl/85/16/10.1063/1.1807033
2004-10-22
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Oxygen transport and incorporation mechanisms in the dry thermal oxidation of 6H-SiC
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/16/10.1063/1.1807033
10.1063/1.1807033
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