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Hydrogen plasma enhancement of boron activation in shallow junctions
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10.1063/1.1811394
/content/aip/journal/apl/85/18/10.1063/1.1811394
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/18/10.1063/1.1811394
/content/aip/journal/apl/85/18/10.1063/1.1811394
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/content/aip/journal/apl/85/18/10.1063/1.1811394
2004-11-03
2014-11-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen plasma enhancement of boron activation in shallow junctions
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/18/10.1063/1.1811394
10.1063/1.1811394
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