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Hydrogen plasma enhancement of boron activation in shallow junctions
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10.1063/1.1811394
/content/aip/journal/apl/85/18/10.1063/1.1811394
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/18/10.1063/1.1811394
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Carrier concentrations vs depth, obtained by SRP, for the samples annealed at (a) , (b) , (c) , (d) , (e) , (f) , (g) , respectively. and uH denote the hydrogenated and unhydrogenated samples, respectively. Note that the ordinates of the graphs are on a log scale.

Image of FIG. 2.
FIG. 2.

Activated boron dose vs annealing temperature for hydrogenated (H) and unhydrogenated (uH) samples.

Image of FIG. 3.
FIG. 3.

SIMS profile showing boron concentration vs depth for (a) hydrogenated and (b) unhydrogenated samples annealed at .

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/content/aip/journal/apl/85/18/10.1063/1.1811394
2004-11-03
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen plasma enhancement of boron activation in shallow junctions
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/18/10.1063/1.1811394
10.1063/1.1811394
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