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HRTEM images of: (a) bottom and interfaces, (b) atomic structure, and (c) atomic structure, of the trilayer sample. Light and dark shading in (a) reflect image contrast generated by thickness variations near the sample surface.
High-angle annular dark-field (-contrast) STEM image of the bottom and interfaces. The inset is a low-magnification view of the trilayer sample cross section that shows the two thinner layers bounding the thicker layer.
HRTEM images of: (a) bottom part of the superlattice, (b) atomic structure of and layers, and (c) atomic structure of for the superlattice sample. Light and dark patches in (a) and (b) are due to thickness variations near the sample surface.
(a) High-angle annular dark field (-contrast) and (b) low-angle annular dark-field STEM images of the superlattice sample. The white and dark bands correspond to , in (a) and , in (b), respectively.
Parameters from HRTEM and STEM analysis. and represent the layer thickness and rms interface roughness. , , , and denote the interface roughness between substrate and buffer, buffer and bottom , bottom and , and top and air, respectively. Units are nanometers.
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