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Schematic description of the SOI rib waveguide cross section.
Three-dimensional AFM image of SOI rib waveguide endface profile after depositing silicon oxynitride films (a) SOI rib waveguide endface obtained by conventional CMP technique; (b) SOI rib waveguide enface obtained by ICPRIE using a three-mask lithography process.
Three-dimensional AFM image of Si/air surface profile at the top of SOI rib waveguide.
Three-dimensional AFM image of sidewall surface profile of the rib with height of .
Scattering loss predictions from sidewall surface roughness using Tien’s theory at .
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