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Structural properties and bandgap bowing of thin films deposited by reactive sputtering
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10.1063/1.1825053
/content/aip/journal/apl/85/21/10.1063/1.1825053
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/21/10.1063/1.1825053
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

XRD spectra of measurements showing the reflections in films with different sulfur content.

Image of FIG. 2.
FIG. 2.

Grazing incidence phi scans recorded at and which display a sixfold symmetry.

Image of FIG. 3.
FIG. 3.

A comparison of XPS spectra of and . The composition of the layers were calculated using the , , and signals.

Image of FIG. 4.
FIG. 4.

The change in the -axis lattice constant of films as a function of the sulfur content calculated using XRD results and the correlation with the composition as determined by XPS.

Image of FIG. 5.
FIG. 5.

Optical transmission spectra of films with different compositions. The ascending numbering is a sign of the decreasing sulfur content.

Image of FIG. 6.
FIG. 6.

Band gap energy of films as a function of the composition .

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/content/aip/journal/apl/85/21/10.1063/1.1825053
2004-11-23
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural properties and bandgap bowing of ZnO1−xSx thin films deposited by reactive sputtering
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/21/10.1063/1.1825053
10.1063/1.1825053
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