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curves of OLEDs measured before and after passivation at (a) , (b) , and (c) .
Etch rate and deposition rate of films deposited at temperatures ranging from .
(a) curve and (b) curve of OLEDs passivated with 100-, 200-, and -thick films, measured before and after passivation at .
Typical curves of normalized luminance vs operating time of OLEDs passivated with PEALD films compared to that of a nonpassivated OLED.
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