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Scanning electron microscope (SEM) picture of the fabricated device. All the square patterns were anchored on the elastomer membrane through covalent bonds while the S-shaped microfabricated flexures were released. The through hole for pumping the whole array is shown as the dotted line and cannot be seen in SEM because it is buried under the elastomer membrane.
(a) SEM picture of the fabricated device when there is no pneumatic pressure applied. (b) SEM picture of the fabricated device under 50 KPa applied pressure. To acquire SEM images, ultraviolet (UV) curable polymer was injected to pump the membrane. The device was then cured under a UV lamp for 12 h to fix the shape at this pumping pressure.
(a) SEM picture of the S-shaped microfabricated suspensions when no pressure was applied to the membrane. The S-shaped suspensions were bent due to the stress between oxide and the silicon after releasing. (b) SEM picture of the S-shaped microfabricated suspensions when 50 KPa pressure was applied to the membrane. The S-shaped suspensions were stretched but remained connected between each pixel.
Measured resistances when pneumatic pump pressures vary from 0 to 50 KPa, which corresponds to the membrane deflection from 0 to 100 μm. The resistances were within 1% difference, proving that consistent and reliable electrical connections were achieved through the S-shaped microfabricated suspensions.
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