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Microfabricated suspensions for electrical connections on the tunable elastomer membrane
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10.1063/1.1835553
/content/aip/journal/apl/85/24/10.1063/1.1835553
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/24/10.1063/1.1835553
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Figures

Image of FIG. 1.
FIG. 1.

Scanning electron microscope (SEM) picture of the fabricated device. All the square patterns were anchored on the elastomer membrane through covalent bonds while the S-shaped microfabricated flexures were released. The through hole for pumping the whole array is shown as the dotted line and cannot be seen in SEM because it is buried under the elastomer membrane.

Image of FIG. 2.
FIG. 2.

(a) SEM picture of the fabricated device when there is no pneumatic pressure applied. (b) SEM picture of the fabricated device under 50 KPa applied pressure. To acquire SEM images, ultraviolet (UV) curable polymer was injected to pump the membrane. The device was then cured under a UV lamp for 12 h to fix the shape at this pumping pressure.

Image of FIG. 3.
FIG. 3.

(a) SEM picture of the S-shaped microfabricated suspensions when no pressure was applied to the membrane. The S-shaped suspensions were bent due to the stress between oxide and the silicon after releasing. (b) SEM picture of the S-shaped microfabricated suspensions when 50 KPa pressure was applied to the membrane. The S-shaped suspensions were stretched but remained connected between each pixel.

Image of FIG. 4.
FIG. 4.

Measured resistances when pneumatic pump pressures vary from 0 to 50 KPa, which corresponds to the membrane deflection from 0 to 100 μm. The resistances were within 1% difference, proving that consistent and reliable electrical connections were achieved through the S-shaped microfabricated suspensions.

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/content/aip/journal/apl/85/24/10.1063/1.1835553
2004-12-09
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microfabricated suspensions for electrical connections on the tunable elastomer membrane
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/24/10.1063/1.1835553
10.1063/1.1835553
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