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Demonstration of ultra-high- small mode volume toroid microcavities on a chip
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View: Figures


Image of FIG. 1.
FIG. 1.

Scanning-electron-microscopy image of a high Q∕V toroid microcavity on a chip, using a 1 μm thermal oxide microdisk as a preform. Inset: the principal and minor toroid diameter.

Image of FIG. 2.
FIG. 2.

Measured quality factor of toroid microcavities, with approximately constant minor diameter and varying principal diameter. The solid lines are the theoretically predicted whispering-gallery quality factor for a microsphere (TE, blue), (TM, red). Inset: The doublet resonance structure for a 28-μm-diameter toroid microcavity. The critical decay time measured for this sample was 10.6 ns. The intrinsic -factor is , corresponding to a modal coupling parameter of . Solid line is a fit to a coupled oscillator model (Ref. 14).

Image of FIG. 3.
FIG. 3.

Ratio of -factor and mode volume using the experimental data from Fig. 2. The mode volume was estimated by numerical finite element modeling using the cavity geometry parameters, as inferred by SEM. Dotted lines give the asymptotic behavior. For large diameter, the intrinsic is approximately constant, and the Q∕V ratio follows an inverse square dependence on principal cavity diameter, whereas for small diameters the exponential dependence of on principal diameter dominates. Inset: The mode area of a toroid microcavity as a function of minor toroid diameter for fixed principal toroid diameter (, 50, and 75 μm are shown). The corresponding mode volume is given by . The highest Q∕V value of more than was measured for a 29‐μm-principal-diameter toroid.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Demonstration of ultra-high-Q small mode volume toroid microcavities on a chip