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Experimental setup of DFM using HOBD method. The laser power is modulated with a frequency so that the output signal of the photodetector contains the beat signal with a frequency of .
Scanning ion microscopy image of a cantilever fabricated by cutting a commercially available cantilever using an FIB. A carbon tip was deposited at the end of the cantilever using the deposition mode of the FIB.
(Color online): (a) and (b) waveforms of the deflection signal measured with the cantilever vibrating at by HOBD method: (a) shows the down-converted beat signal with a frequency of while (b) shows the component contained in the deflection signal; (c) and (d) FFT spectra of the deflection signal plotted around the beat frequency and vibration frequency, respectively. The spectra show that the signal amplitude of component was 12 times larger than that of component.
DFM image of a surface obtained by HOBD method in air (, , , tip velocity: ).
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