1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Dynamic force microscopy at high cantilever resonance frequencies using heterodyne optical beam deflection method
Rent:
Rent this article for
USD
10.1063/1.1842368
/content/aip/journal/apl/85/25/10.1063/1.1842368
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/25/10.1063/1.1842368
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Experimental setup of DFM using HOBD method. The laser power is modulated with a frequency so that the output signal of the photodetector contains the beat signal with a frequency of .

Image of FIG. 2.
FIG. 2.

Scanning ion microscopy image of a cantilever fabricated by cutting a commercially available cantilever using an FIB. A carbon tip was deposited at the end of the cantilever using the deposition mode of the FIB.

Image of FIG. 3.
FIG. 3.

(Color online): (a) and (b) waveforms of the deflection signal measured with the cantilever vibrating at by HOBD method: (a) shows the down-converted beat signal with a frequency of while (b) shows the component contained in the deflection signal; (c) and (d) FFT spectra of the deflection signal plotted around the beat frequency and vibration frequency, respectively. The spectra show that the signal amplitude of component was 12 times larger than that of component.

Image of FIG. 4.
FIG. 4.

DFM image of a surface obtained by HOBD method in air (, , , tip velocity: ).

Loading

Article metrics loading...

/content/aip/journal/apl/85/25/10.1063/1.1842368
2004-12-15
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dynamic force microscopy at high cantilever resonance frequencies using heterodyne optical beam deflection method
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/25/10.1063/1.1842368
10.1063/1.1842368
SEARCH_EXPAND_ITEM