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(a) Dark-field TEM images of a cross section sample taken with . The layer thicknesses are 2 (bottom), 4, 6, 8, 10, 15, and 20 (top) MLs. (b) Simulated modulus of the (002) beam of normalized with the modulus of the (002) beam of plotted as a function of the concentration for different TEM samples thicknesses.
Electron diffraction patterns of a cross section sample along the -zone axis in (a) the region of the top layer with a thickness of and (b) the region of the buffer layer.
Measured lattice parameter profile along the growth direction evaluated from cross section lattice-fringe HRTEM images in units of obtained from: (a) all layers in regions without inclusions [see Fig. 1(b)]; and (b) an area of the layer with thickness containing an inclusion [see Fig. 1(a), arrow in the second layer counted from top].
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