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Synergism between low-energy neutral particles and energetic ions in the pulsed glow discharge deposition of diamond-like carbon films
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10.1063/1.1775876
/content/aip/journal/apl/85/5/10.1063/1.1775876
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/5/10.1063/1.1775876
/content/aip/journal/apl/85/5/10.1063/1.1775876
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/content/aip/journal/apl/85/5/10.1063/1.1775876
2004-07-27
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Synergism between low-energy neutral particles and energetic ions in the pulsed glow discharge deposition of diamond-like carbon films
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/5/10.1063/1.1775876
10.1063/1.1775876
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