1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Instant curvature measurement for microcantilever sensors
Rent:
Rent this article for
USD
10.1063/1.1781389
/content/aip/journal/apl/85/6/10.1063/1.1781389
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/6/10.1063/1.1781389
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Image of multicantilever chip and positions of LED spots are shown. Cantilevers (dark color) with length, width, and thickness are connected to the chip through base beams with thickness. The spacing between LED spots is about .

Image of FIG. 2.
FIG. 2.

Deflection of cantilever was plotted against time as temperature varies. Numbers from 1 to 8 represent the positions of light spots shown in Fig. 1.

Image of FIG. 3.
FIG. 3.

Deflection of cantilever is plotted against positions of light spots. , , , , , , , . Inset shows the variation of the radius of curvature as temperature decreases.

Loading

Article metrics loading...

/content/aip/journal/apl/85/6/10.1063/1.1781389
2004-08-04
2014-04-25
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Instant curvature measurement for microcantilever sensors
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/6/10.1063/1.1781389
10.1063/1.1781389
SEARCH_EXPAND_ITEM