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Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates
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10.1063/1.1780605
/content/aip/journal/apl/85/7/10.1063/1.1780605
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/7/10.1063/1.1780605
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Figures

Image of FIG. 1.
FIG. 1.

FIB sectioning applied to dimensional profiling. (a) Original pore; scale bar . (Inset) Single channel fabricated by FIB ( aperture), showing the damage pattern around the mouth of the channel; scale bar . (b)–(d) Original pore overlaid with rectangular milled volume successively exposing larger portions of the pore; scale bar . Scanning electron micrographs (, 52° viewing angle) were collected by briefly halting the ion beam sectioning process.

Image of FIG. 2.
FIG. 2.

Confocal fluorescence image sectioning parallel to the plane. (a) Vertical slice through a dyed-PMMA layer with a single pore spanning the layer; scale bar . Measured . (b) Vertical slice through a dye-filled pore; scale bar . (Inset) Coordinate system for confocal imaging.

Image of FIG. 3.
FIG. 3.

(a) Confocal fluorescence image of two dye-filled pores, showing an plane at a position approximately at the center of the PMMA layer; scale bar . Measured fluorescent spot diameter is . (b) SEM image of a patterned array of submicrometer pores. Each milling location was positioned via a computer generated graphical image overlay. SEM image. Pore ; scale bar .

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/content/aip/journal/apl/85/7/10.1063/1.1780605
2004-08-10
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/7/10.1063/1.1780605
10.1063/1.1780605
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