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Positron “low momentum fraction,” or -parameter, for Si implanted with , and annealed. Values greater than 1.0 indicate open-volume defects. We attribute values less than 1.0 (in these samples only) to complexes.
Positron spectra, normalized to the spectrum for silicon, showing relative intensity vs electron momentum. Peaks in the data from annealed samples match the “fingerprint” of fluorine.
Data for the FZ annealed sample can be constructed by summing spectra from and , supporting the interpretation that the peak observed is due to fluorine.
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