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Observation of fluorine-vacancy complexes in silicon
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10.1063/1.1784045
/content/aip/journal/apl/85/9/10.1063/1.1784045
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/9/10.1063/1.1784045
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Positron “low momentum fraction,” or -parameter, for Si implanted with , and annealed. Values greater than 1.0 indicate open-volume defects. We attribute values less than 1.0 (in these samples only) to complexes.

Image of FIG. 2.
FIG. 2.

Positron spectra, normalized to the spectrum for silicon, showing relative intensity vs electron momentum. Peaks in the data from annealed samples match the “fingerprint” of fluorine.

Image of FIG. 3.
FIG. 3.

Data for the FZ annealed sample can be constructed by summing spectra from and , supporting the interpretation that the peak observed is due to fluorine.

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/content/aip/journal/apl/85/9/10.1063/1.1784045
2004-08-27
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Observation of fluorine-vacancy complexes in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/85/9/10.1063/1.1784045
10.1063/1.1784045
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