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Hf core-level spectra in films with tilt angles of 30° (dashed curves) and 75° (solid curves).
(a) Si and (b) O core-level spectra in with tilt angles of 30° and 75°.
HRTEM images of films annealed at temperatures of (a) , (b) , and (c) in ambient for and characteristics (d) for the same samples. The measurements were performed at and room temperature. The inset shows the accumulation capacitance density at and current density at for films with varying ratios, where is the interfacial layer thickness and is the layer thickness.
The atomic percent areas of each chemical state in the deconvoluted Si and O spectra at 30° tilt.
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