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Unusual stress behavior in -incorporated hydrogenated amorphous carbon films
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10.1063/1.1883328
/content/aip/journal/apl/86/11/10.1063/1.1883328
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/11/10.1063/1.1883328
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Dependence of the residual compressive stress of the -incorporated films on the concentration of tungsten.

Image of FIG. 2.
FIG. 2.

HRTEM images and selected area electron diffraction patterns of films with various concentrations: (a) 1.9, (b) 2.8, (c) 3.6, and (d) .

Image of FIG. 3.
FIG. 3.

The variation of total energy of and bonds as a function of distorted bond angle.

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/content/aip/journal/apl/86/11/10.1063/1.1883328
2005-03-07
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/11/10.1063/1.1883328
10.1063/1.1883328
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