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Revealing hidden pore structure in nanoporous thin films using positronium annihilation lifetime spectroscopy
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10.1063/1.1886905
/content/aip/journal/apl/86/12/10.1063/1.1886905
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/12/10.1063/1.1886905
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Cross-sectional scanning electron microscope image of a trenches etched and ashed in low- (upper half) over one complete level metal structure (lower half) showing that the deeper sidewalls are damaged (bowing and voids) more severely than the upper part of the sidewalls.

Image of FIG. 2.
FIG. 2.

The intensity of lifetime components fitted for the PECVD film as a function of positron mean implantation depth . The intrinsic micropore intensity is the sum of the and intensities.

Image of FIG. 3.
FIG. 3.

Cartoon of the pore structure deduced using PALS data on the PECVD film of . A layered structure is assumed with deduced thicknesses displayed along the right side. White dots represent sub-nm micropores. Small (isolated) mesopores and large (interconnected) meso pores are shown below a sealing layer. The arrows on the left indicate the approximate positions of the exposed surface after the corresponding time of etching.

Image of FIG. 4.
FIG. 4.

The escape fraction (at ) (open squares) and the postash film thickness change, (solid circles), for PECVD vs the remaining film thickness after varying etch times.

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/content/aip/journal/apl/86/12/10.1063/1.1886905
2005-03-14
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Revealing hidden pore structure in nanoporous thin films using positronium annihilation lifetime spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/12/10.1063/1.1886905
10.1063/1.1886905
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