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(Color online) SEM micrograph of the 9G9 membrane on a copper plate. Upper inset: the schematic of the nanoscale multilayer membrane free suspended over an opening. Bottom inset: the interference microscopy 3D image of the 9G9 membrane with a diameter on a copper plate in rest state.
(Color online) Repeatable deflections of the membrane under overpressure or underpressure. (a) 3D interference microscopy micrograph of the deflected nanomembrane; (b) interference pattern of deflected membrane under ; (c) profile of deflected membrane in (a); (d) underpressure to overpressure cycles of the 9G9 membrane with different pressure ranges, ▵ for first cycle and ◻ for second cycle .
(Color online) (a) Creep behavior for the free-suspended 9G9 membrane. The temporal variation of the relative strain of the free-suspended nanomembrane under different pressures: ◻: , 엯: , and ▵: . (b) Optical micrographs of the nanomembrane with a diameter at different elapsing times after sudden pressure release. (c) The dynamic data of nanomembrane recovery area with different high-pressure loading times; (d) The scaling relationship between the high-pressure loading time and membrane recovery time, solid line is the fit of the experimental data.
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