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(Color online) SIMS depth profiles of Pb, Pt, Ti, and in the sample as received. As noted in the figure, the O signal intensity is multiplied by 0.1 and Pb signal intensity is multiplied by 10, respectively.
(Color online) SIMS concentration ratio versus depth in PZT/Pt films when annealed at 450, 550, and for .
Diffusion coefficient of oxygen in PZT film at 450 and showing diffusion coefficient estimation at .
(Color online) Exchanged oxygen tracer concentration ratio in PZT/Pt film versus relative depth from the film surface after annealing at for 30 and and simulated diffusion profile (solid line) calculated using a diffusion coefficient of .
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