1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Diffusion and dissociation mechanisms of vacancy-oxygen complex in silicon
Rent:
Rent this article for
USD
10.1063/1.1897433
/content/aip/journal/apl/86/14/10.1063/1.1897433
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/14/10.1063/1.1897433
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Structural changes in the reaction of . (a)–(d) are shown projected to a [110] plane of silicon. (e) is shown in a section of a [100] projection. Silicon, oxygen, and vacancy are represented as white, black circles, and black dot, respectively.

Image of FIG. 2.
FIG. 2.

Diffusion steps of VO caused by migration of a vacancy along a six-member ring. Silicon, oxygen, and vacancy are represented as white, black, and dashed circles, respectively.

Image of FIG. 3.
FIG. 3.

Formation energy diagram for VO diffusion caused by migration of a vacancy along a six-member ring.

Loading

Article metrics loading...

/content/aip/journal/apl/86/14/10.1063/1.1897433
2005-03-30
2014-04-23
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diffusion and dissociation mechanisms of vacancy-oxygen complex in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/14/10.1063/1.1897433
10.1063/1.1897433
SEARCH_EXPAND_ITEM