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Lateral-field-excited thin-film Lamb wave resonator
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10.1063/1.1900312
/content/aip/journal/apl/86/15/10.1063/1.1900312
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/15/10.1063/1.1900312

Figures

Image of FIG. 1.
FIG. 1.

Longitudinal to shear wave amplitude ratio across the plate.

Image of FIG. 2.
FIG. 2.

(a) Lateral-field-excited bulk resonator and (b) lateral-field-excited Lamb wave resonator.

Image of FIG. 3.
FIG. 3.

Topology of the Lamb wave resonator.

Image of FIG. 4.
FIG. 4.

Close to resonance frequency characteristics of the Lamb wave resonator.

Tables

Generic image for table
Table I.

Design parameters of the Lamb wave resonator.

Generic image for table
Table II.

Process parameters used for deposition of the AlN films.

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/content/aip/journal/apl/86/15/10.1063/1.1900312
2005-04-05
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Lateral-field-excited thin-film Lamb wave resonator
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/15/10.1063/1.1900312
10.1063/1.1900312
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