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Schematic diagram of gold coating enhanced AFM local oxidation.
(a)–(d) Typical AFM images and oxide height of local oxidation on (a), (b) pure silicon substrate and (c), (d) silicon substrate with a gold coating, at different applied voltages. (e) TEM planar view micrograph of oxide lines (brighter part) grown by AFM oxidation on silicon substrate with a gold coating at an applied voltage of .
AFM oxidative (a) height and (b) width dependence on gold thickness under two applied voltages (8 and ); the solid lines connecting data points are only for visual guides.
AFM oxide heights of local oxidation on (a) InP and (b) InP with a gold coating; insets show the corresponding AFM images.
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