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Out-of-plane microlens array fabricated using ultraviolet lithography
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10.1063/1.1901829
/content/aip/journal/apl/86/16/10.1063/1.1901829
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/16/10.1063/1.1901829

Figures

Image of FIG. 1.
FIG. 1.

Fabrication principle of the out-of-plane microlens array: (a) before development and (b) after development.

Image of FIG. 2.
FIG. 2.

Refraction compensation principle to obtain 45° refractive angle.

Image of FIG. 3.
FIG. 3.

Measured transmission spectrum of -thick unexposed SU-8 100, transmission of the PMMA filter, light intensity of the UV station with and without PMMA filter.

Image of FIG. 4.
FIG. 4.

SEM pictures of the out-of-plane microlens array (a) perpendicularly adhered on the substrate and (b) mechanically removed from the substrate to measure the surface profile.

Image of FIG. 5.
FIG. 5.

Microlens array’s focal pads (the marked dotted line stands for the edges of pixels).

Tables

Generic image for table
Table I.

Average measurement results for the out-of-plane polymer microlens array.

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/content/aip/journal/apl/86/16/10.1063/1.1901829
2005-04-13
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Out-of-plane microlens array fabricated using ultraviolet lithography
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/16/10.1063/1.1901829
10.1063/1.1901829
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