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Fabrication principle of the out-of-plane microlens array: (a) before development and (b) after development.
Refraction compensation principle to obtain 45° refractive angle.
Measured transmission spectrum of -thick unexposed SU-8 100, transmission of the PMMA filter, light intensity of the UV station with and without PMMA filter.
SEM pictures of the out-of-plane microlens array (a) perpendicularly adhered on the substrate and (b) mechanically removed from the substrate to measure the surface profile.
Microlens array’s focal pads (the marked dotted line stands for the edges of pixels).
Average measurement results for the out-of-plane polymer microlens array.
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