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Schematic of the laser interferometric optical setup.
(a) Dependence of the response amplitude between the source and the clamped end of the beam (see inset) between Si (squares) and (circles). Dashed line represents a first-order exponential fit. (b) Transfer characteristics between the drive signal and the measured photodetector output. Inset shows frequency spectra for various driving signals. Dashed line represents a linear regression fit.
Steady-state temperature distribution in (a) and (b) Si– stacks. (c) Transient response to a 10 MHz square wave signal at the surface of the Si device layer, where (A) , (B) , (C) , (D) , (E) , (F) , and (G) .
Material properties used for the calculations.
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