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Diffraction element assisted lithography: Pattern control for photonic crystal fabrication
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10.1063/1.1924894
/content/aip/journal/apl/86/19/10.1063/1.1924894
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/19/10.1063/1.1924894
/content/aip/journal/apl/86/19/10.1063/1.1924894
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/content/aip/journal/apl/86/19/10.1063/1.1924894
2005-05-04
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diffraction element assisted lithography: Pattern control for photonic crystal fabrication
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/19/10.1063/1.1924894
10.1063/1.1924894
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