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Ion energy uniformity in high-frequency capacitive discharges
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10.1063/1.1848183
/content/aip/journal/apl/86/2/10.1063/1.1848183
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/2/10.1063/1.1848183
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Ion energy vs ion flux at the discharge center for three different frequencies. The argon pressure was

Image of FIG. 2.
FIG. 2.

Measured ion flux (symbols) and calculated rf voltage (dashed line) as a function of the radial distance (the discharge center is at ) for an , argon discharge.

Image of FIG. 3.
FIG. 3.

Ion energy distribution function at the center, the side, and the corner of the grounded electrode for the same conditions as in Fig. 2.

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/content/aip/journal/apl/86/2/10.1063/1.1848183
2004-12-30
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion energy uniformity in high-frequency capacitive discharges
http://aip.metastore.ingenta.com/content/aip/journal/apl/86/2/10.1063/1.1848183
10.1063/1.1848183
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